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Experiments on the formation of low resistance in-contacts on Al-doped ZnSe

Identifieur interne : 000828 ( Main/Exploration ); précédent : 000827; suivant : 000829

Experiments on the formation of low resistance in-contacts on Al-doped ZnSe

Auteurs : RBID : ISTEX:339_1981_Article_BF00617844.pdf

English descriptors

Abstract

The formation of low-resistance indium contacts on aluminium dopedn-type ZnSe has been followed during the heat treatment. The contacts are formed by heavy doping of the depletion zone. The increased doping results from two different mechanisms. The most important one appears to be diffusion controlled, and the other is believed to be caused by regrowth of ZnSe dissolved in the indium.

DOI: 10.1007/BF00617844

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Le document en format XML

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